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Investigating the growth of AlGaN/AlN heterostructure by modulating the substrate temperature of AlN buffer layer
Neha Aggarwal, Shibin Krishna, Lalit Goswami, Shubhendra Kumar Jain, Akhilesh Pandey, Abhiram Gundimeda, Pargam Vashishtha, Jasveer Singh, Sandeep Singh, Govind Gupta
Feb 08, 2021
Abstract: We have investigated the impact of AlN buffer layer growth parameters for developing highly single crystalline AlGaN films. The low mobility of Al adatoms and high temperature for compound formation are amongst the...