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Surface defects incorporated diamond machining of silicon
Abstract: This paper reports the performance enhancement benefits in diamond turning of the silicon wafer by incorporation of the surface defect machining (SDM) method. The hybrid micromachining methods usually require...
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Surface defects incorporated diamond machining of silicon
Abstract This paper reports the performance enhancement benefits in diamond turning of the silicon wafer by incorporation of the surface defect machining (SDM) method. The hybrid...
Published by:
Surface defects incorporated diamond machining of silicon
Abstract: This paper reports the performance enhancement benefits in diamond turning of the silicon wafer by incorporation of the surface defect machining (SDM) method. The hybrid micromachining methods usually require...
Published by:
Surface defects incorporated diamond machining of silicon
Abstract This paper reports the performance enhancement benefits in diamond turning of the silicon wafer by incorporation of the surface defect machining (SDM) method. The hybrid...
Published by: