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Cover Image for Vacuum Packaged Low-Power Resonant MEMS Strain Sensor View Article
Vacuum Packaged Low-Power Resonant MEMS Strain Sensor
CD Do, A Erbes, J Yan, K Soga, AA Seshia
Aug 08, 2016
MEMS resonator resonant sensor oscillator MEMS-CMOS interface Temperature compensation
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Cover Image for Non-Linear Frequency Noise Modulation in a Resonant MEMS Accelerometer View Article
Non-Linear Frequency Noise Modulation in a Resonant MEMS Accelerometer
X Zou, AA Seshia
Aug 10, 2017
Resonant MEMS accelerometers offer the potential for very high resolution and wide bandwidth measurements over a large input dynamic range. The read-out is implemented by constructing an oscillator with the resonator as the...
MEMS resonator resonant sensor oscillator MEMS sensor interface
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