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Cover Image for Weakly Coupled Piezoelectric MEMS Resonators for Aerosol Sensing. View Article
Weakly Coupled Piezoelectric MEMS Resonators for Aerosol Sensing.
Malar Chellasivalingam, Hassan Imran, Milind Pandit, Adam M Boies, Ashwin A Seshia
Jun 03, 2020
This paper successfully demonstrates the potential of weakly coupled piezoelectric MEMS (Micro-Electro-Mechanical Systems) gravimetric sensors for the detection of ultra-fine particulates. As a proof-of-principle, the detection...
Q factor amplitude ratio sensitivity amplitude ratio stability coupled MEMS resonators frequency stability Particulate Matter piezoelectric MEMS soot particles
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