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Fabrication of nanostructured transmissive optical devices on ITO-glass with UV1116 photoresist using high-energy electron beam lithography
C Williams
,
R Bartholomew
,
G Rughoobur
,
GSD Gordon
,
AJ Flewitt
,
TD Wilkinson
Dec 20, 2016
nanofabrication
electron beam lithography
UV1116
insulating substrate
plasmonics
transmissive optical devices
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