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Cover Image for Comparison between Single Shot Micromachining of Silicon with Nanosecond Pulse Shaped IR Fiber Laser and DPSS UV Laser View Article
Comparison between Single Shot Micromachining of Silicon with Nanosecond Pulse Shaped IR Fiber Laser and DPSS UV Laser
K Li, M Sparkes, W Oneill
Dec 18, 2014
DPSS UV laser IR fiber laser micromachining shaped pulse silicon optical/thermal dynamic properties
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