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A Closed-Loop Readout Configuration for Mode-Localized Resonant MEMS Sensors

C Zhao, M Pandit, B Sun, G Sobreviela, X Zou, A Seshia

OAI: oai:www.repository.cam.ac.uk:1810/265207 • DOI: 10.17863/CAM.11279

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Abstract

mode localized resonant sensor self-sustained oscillator